|Deadline for Abstract :|
The conference will cover a wide range of topics including the following.
|Abstract Submission and Formatting Guidelines|
1. ALD Fundamentals
|a)||Precursors & Chemistry
|Precursor Design, Precursor Delivery Systems, ALD Recipe Development, Simulation, Modeling, Theory of ALD|
|b)||Growth & Characterization|
|In-Situ Monitoring & Analysis, ALD Surface Chemistry & Initiation of ALD Growth, Surface Preparation for ALD, Characterization of ALD Coatings, Highly Conformal ALD Processes|
|Molecular Layer Deposition, Organic-Inorganic Hybrid Materials, Atomic Layer Epitaxy & Doping|
2. ALD Applications
|Catalysis and Fuel Cells, Solar Photovoltaic and Photocatalytic, Batteries and Storage|
|b)|| ULSI FEOL Applications
|High-k and Related Device Applications, Gate Electrode, Contact Metal, 3D-Transistor Fabrication|
|c)||ULSI BEOL Applications
|Interconnect Technologies, Cu-Diffusion Barrier Layer, Cu-Capping Technologies, Low-k Pore Sealing|
|DRAM Capacitor Fabrication, High-k Dielectrics, High Work Function Electrode, Novel Non-Volatile Memories|
|MEMS/NEMs, Biotechnologies (Anti-bacterial Films, Medical Devices), Lighting & Display, Magnetic Materials, Nano Structure Synthesis and Fabrication, Nano-Laminates, Nanotubes, Nanowires, Nanopores, Nanoparticles|
3. ALD for Manufacturing
|a)||Reactor and Equipment Design|
|Design for Manufacturing, ALD Reactor Modeling & Simulation, Patterned & Selective Area ALD, ALD Integration with Conventional Processes|
|b)||Large Format ALD
|Spatially Controlled ALD, Fast ALD, R2R|
Abstract Submission and Formatting GuidelinesAbstracts are due:
Prospective authors are invited to submit online. Abstracts should be no more than one page, including figures, in Adobe PDF format. Abstracts should be formatted in Arial and include in the following order:
- Title (Arial, 14 pt bold, centered, title case), followed by,
- Presenting author and co-author affiliation, city, and country. Be sure to include the presenting author's e-mail. (Arial, 11 pt, centered)
- Abstract body (Arial, 10 pt)
Template for abstract
In addition, the submission website will provide instructions for uploading your abstract, please review those details. When submitting abstracts, authors should create an account on the website. Presenting author and co-author informations should be registered. 1st and 2nd choices of session categories should be selected. A template of abstract can be downloaded from the ALD 2014 website. Notification of acceptance will be made to the authors by April 1, 2014. Upon notification, authors will be requested to confirm their participation in the conference. The accepted abstracts will be included in the booklet that the participants will receive on site at the registration desk of ALD 2014. As in past conferences, the presentations will follow an all-electronic format, and electronic copies of the presentations (including oral component, and questions and answers) will be made available in the form of copy-secured DVDs.
Abstract submission has been closed.
Abstract Division c/o Japan Convention Services, Inc.
Tel: +81-(0)3-3500-5935 Fax: +81-(0)3-5283-5952
Office hour: 10:00-17:30 UTC +9, Monday through Friday