ALD 2014 [14th International Conference on Atomic Layer Deposition] June 15-18, 2014 Kyoto, Japan
Technical Program
Technical Program  
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Student Award for best presentation of graduate research in Atomic Layer Deposition

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Best Student Paper Award Sponsor
LamResearch Corporation

Atomic Layer Deposition Special Issue
Journal of Vacuum Science & Technology A

Journal of Vacuum Science & Technology A is soliciting research articles for publication in a Special January/February 2015 Issue on Atomic Layer Deposition.
This special issue is planned in collaboration with the 14th International Conference on Atomic Layer Deposition (ALD 2014) to be held in Kyoto, Japan during June 15-18, 2014. The Special Issue will be dedicated to the science and technology of atomic layer controlled deposition of thin films. While a significant fraction of the articles are expected to be based on material presented at ALD 2014, research articles that are on ALD but were not presented at this conference are also welcome: the special issue will be open to all articles on the science and technology of ALD.
Papers will be reviewed using the same criteria as regular JVST articles and must meet JVST standards for both technical content and written English. To be published in JVST, the manuscript must:
(1) present original findings, conclusions or analysis that have not been published previously
(2) be free of errors and ambiguities,
(3) support conclusions with data and analysis,
(4) written clearly, and
(5) have high impact in its field.
Submit your manuscripts to JVST using the journals’ online manuscript submission system at
In preparing your article, you should follow the instructions for contributors, which may be found at
Authors are encouraged to use the JVST templates. The easiest way to prepare your manuscript is to use the available JVST Article Template to delete and replace text as necessary. This file and the template used to create it are available at the site above. Online, you will have an opportunity to tell us that your paper is a part of the special issue by choosing “ALD Special Issue.”
Acceptable manuscript file types are MSWord, LaTeX, and PDF. For the initial submission/review process, a single PDF or MSWord file including the figures is sufficient. However, once a paper is accepted, MSWord or TeX file of the text, any tables and the list of figure captions along with the separate figure files will be required for final production. Use of color in Figures is encouraged. Your FIGURES CAN APPEAR ONLINE IN COLOR FOR FREE. Prepare illustrations in the final published size, not oversized or undersized.
For any other details about manuscript preparation, please refer to the JVST A (

Manuscript deadline: August 30, 2014
Note: Please observe the deadline to allow for timely processing. JVST will try to include papers submitted after this deadline but we can not guarantee that they will be included in the special issue. Papers will appear online in the Special Issue as soon as they are accepted.

JVST Special Issue Announcement  PDF Download
Updated: Friday, February 21, 2014
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